Skip Nav Destination
Open Access
Update search
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
Filter
All
- All
- Title
- Author
- Author Affiliations
- Full Text
- Abstract
- Keyword
- DOI
- ISBN
- EISBN
- ISSN
- EISSN
- Issue
- Volume
- References
NARROW
Format
Topics
Subjects
Journal
Article Type
Issue Section
Date
Availability
Journal Articles
Journal Articles
Process dispersion monitoring: Innovative AEWMA control chart in semiconductor manufacturing
Open Access
Journal:
AIP Advances
AIP Advances 14, 015255 (2024)
Published: January 2024
Journal Articles
Application of linear iterative methods for the proximity effect correction in electron beam lithography
Open Access
Journal:
AIP Advances
AIP Advances 13, 055306 (2023)
Published: May 2023
Journal Articles
Journal Articles
Journal Articles
Z. Bouza, J. Byers, J. Scheers, R. Schupp, Y. Mostafa, L. Behnke, Z. Mazzotta, J. Sheil, W. Ubachs, R. Hoekstra, M. Bayraktar, O. O. Versolato
Journal:
AIP Advances
AIP Advances 11, 125003 (2021)
Published: December 2021
Includes: Supplementary data
Journal Articles
Journal Articles
Concept model of atomic hydrogen dry developing process for photolithographic patterning
Open Access
Journal:
AIP Advances
AIP Advances 10, 105223 (2020)
Published: October 2020
Includes: Supplementary data
Journal Articles
Machine learning-based approach for automatically tuned feedback-controlled electromigration
Journal:
AIP Advances
AIP Advances 10, 065301 (2020)
Published: June 2020
Journal Articles
Journal Articles
Mei-Li Hsieh, Shu-Yu Chen, Alex Kaiser, Yang-Jhe Yan, B. Frey, Ishwara Bhat, Rajendra Dahal, Sayak Bhattacharya, Sajeev John, Shawn-Yu Lin
Journal:
AIP Advances
AIP Advances 9, 085206 (2019)
Published: August 2019
Journal Articles
Journal:
AIP Advances
AIP Advances 8, 125228 (2018)
Published: December 2018
Includes: Supplementary data
Journal Articles
Journal Articles
N. Srocka, A. Musiał, P.-I. Schneider, P. Mrowiński, P. Holewa, S. Burger, D. Quandt, A. Strittmatter, S. Rodt, S. Reitzenstein, G. Sęk
Journal:
AIP Advances
AIP Advances 8, 085205 (2018)
Published: August 2018
Journal Articles
Yu-Huan Liu, Yuan-Yuan Zhao, Xian-Zi Dong, Mei-Ling Zheng, Feng Jin, Jie Liu, Xuan-Ming Duan, Zhen-Sheng Zhao
Journal:
AIP Advances
AIP Advances 8, 065317 (2018)
Published: June 2018
Journal Articles
Journal:
AIP Advances
AIP Advances 7, 105115 (2017)
Published: October 2017
Includes: Supplementary data
Journal Articles
Jayakumar Perumal, Tianxun Gong, Dinish U. S., Kavitha Devi Buddharaju, Patrick Lo Guo-Qiang, Malini Olivo
Journal:
AIP Advances
AIP Advances 7, 055017 (2017)
Published: May 2017
Includes: Supplementary data
Journal Articles
Journal Articles
Controllable deposition distance of aligned pattern via dual-nozzle near-field electrospinning
Open Access
Journal:
AIP Advances
AIP Advances 7, 035310 (2017)
Published: March 2017
Journal Articles
Journal:
AIP Advances
AIP Advances 7, 015019 (2017)
Published: January 2017
Includes: Supplementary data
1