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Optical emission studies of reactive species in plasma deposition

AIP Conf. Proc. 73, 1–5 (1981)
This article has been cited by the following articles in journals that are participating in CrossRef Cited-by Linking.
  • Kenji Nakajima
  • Kaori Miyazaki
  • Hideomi Koinuma
  • Kota Sato
Journal of Applied Physics 84, 606 (1998)
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