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Journal Articles (20554)

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Atomic Layer Deposition (ALD) (98)
Gallium Oxide Materials and Devices (56)
Special Topic Collection on Atomic Layer Deposition (ALD) (39)
Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE (32)
Atomic Layer Etching (ALE) (27)
Special Topic Collection: Reproducibility Challenges and Solutions (26)
Commemorating the Career of Charles S. Fadley (25)
Functional Coatings (25)
Honoring Dr. Scott Chambers’ 70th Birthday and His Leadership in the Science and Technology of Oxide Thin Films (24)
Commemorating the Career of Pat Thiel (23)

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